| Area of application: |
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast . |
| Description: |
Pressure control and isolation valves with extended control range, based on the pendulum principle. For downstream applications. Compared to Series 650, Series 651 achieves considerably shorter pressure rise times at low gas flows. Compact design. Fast, virtually particle-free and shock-free operation. Powerful integrated controller. |
| Nominal inside diameters (ID): |
160 (6" ) - 400 (16") |
| Body material: |
Aluminium hard anodized; Aluminum |
| Actuator types: |
Stepper motor, integrated controller |
| Feedthrough: |
Rotary feedthrough (actuator), Shaft feedthrough (sealing ring) |
| Sealing technology: |
SEALRING-System |
| Sealing materials: |
Bonnet: FKM (VITON®) / Gate: FKM (VITON®) |
| Cycles until first service: |
1 million control cycles, 200'000 closing cycles |
| Leak rate: |
Body: < 1 . 10-9 mbar ls-1
Valve seat: < 1 . 10-9 mbar ls-1 |
| Pressure control |
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The controller ensures fast and accurate pressure control. The unique LEARN feature automatically determines the characteristic of the vacuum system. LEARN needs to be performed only once during system setup.
With its adaptive algorithm the controller contiuously adjusts to the current process conditions (gas type, gas flow). This assures allways an optimal pressure control performance. |
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| Position control |
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Position control mode allows to move the valve plate at any selected position. |
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| Display |
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A bright 4 digit display indicates status and valve position. |
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| Remote operation |
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Via a RS232-, Logic- or DeviceNet Interface the valve may be controlled from a host computer.
The RS232 interface has digital inputs to close and open the valve in addtion.
The Logic interface allows to control the valve via digital and analog inputs and outputs. |
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| Service Port |
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The valve has a service port (RS232) to connect a computer. A software allows for easy setup, operation, monitoring, data recording, data analysis and diagnostics.
'Control View' as basic version is available as freeware. 'Control Performance Analyzer' is available on order. A service cable from VAT is required. |
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| Power Failure Option (PFO) |
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This function closes the valve automatically in case of a power failure. |
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| Sensor Power Supply (SPS) |
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Optionally the valve may be equipped with a ±15 VDC supply module for the sensor(s). |
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| RS232 interface |
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Serial RS232-Interface:
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Control of all functions,
selectable baud rate (600 - 115200) |
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Digital inputs:
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Close valve and open valve |
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Digital outputs:
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Valve closed and valve open |
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Analog outputs:
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Actual pressure and actual valve positon (optional) |
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| Logic interface |
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Digital inputs:
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Close valve and open valve |
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Inhibit operation via service port |
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Digital outputs:
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Valve closed and valve open |
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Analog inputs:
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Pressure- or position setpoint |
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Analog outputs:
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Actual pressure and actual valve positon |
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| DeviceNet® interface |
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Control of all functions. DeviceNet® group 2 slave with Polling, Bit Strobe and Change of State/Cyclic Transmission. UCMM port (unconnected message manager) is available. 'Offline Connection Set' according to DeviceNet® specification relaease 2.0 is implemented. |
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| Technical Data |
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Power input:
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24 VDC, 60 W max. |
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Control accuracy:
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0.1% of sensor full scale |
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Step resolution:
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DN160 - DN250: 12'444 postions (full stroke) |
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DN320 - DN400: 13'440 postions (full stroke) |
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Sensor input:
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0-10 VDC linear to pressure |
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differential, Ri > 100kOhm |
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Sensor supply:
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+ 24 VDC, +/- 15VDC |
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Power Failure Option:
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Battery type: Ultracap
Charging time: 2 min |
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Durability (25°C) up to 10 years |
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Input (Interface):
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Digital: control with relay, opto coupler or
voltage source (5-24 VDC) |
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Analog: 0 - 10 VDC, Ri > 100kOhm |
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Output (Interface):
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Digital: potential free relay contacts,
70V max., 500 mA max., 10 W max. |
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Analog: 0 - 10 VDC, 1 mA max. |
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